SMC High Vacuum Angle Valve
Product Code: XLA-16G-2M9//...
Available to Order
tech sheet
Details
Seal Material
FKM
Width mm
108
Height mm
38
Application
High vacuum angle valve for semiconductor and vacuum applications
Body Material
Aluminium
Operation
Normally Closed
Angle
Angle valve
Valve Material
Aluminium
Length mm
60
Actuation
Single acting
Brand
SMC
Series
XL2
Feature
Bellows seal
Manufacturer
SMC
Ambient Temperature
5 to 60°C
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Length mm
Height mm
Width mm
Feature
Flange Specification
Application
Seal Type
Actuation
Actuator Working Temperature
Angle
Operation
List Price
104
66
171
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–
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–
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–
Available to Order
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Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
KF NW
High vacuum applications requiring minimal contamination and corrosion resistance
Bellows Seal
Single acting
–
Angle valve
Normally Closed
Available to Order
74
48
121
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
–
High vacuum angle valve for semiconductor and vacuum applications
Bellows Seal
Normally Closed
–
–
–
Available to Order
98
66
171
High corrosion resistance to fluorine gas Minimal outgassing Minimal contamination from heavy metals Uniform baking temperature Lightweight Compact
–
–
Bellows Seal
Single acting
–
–
Normally Closed
Available to Order
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–
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–
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–
–
Available to Order
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Available to Order
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Available to Order
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High Vacuum
–
–
5 to 60°C
Normally Closed
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
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Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
–
High Vacuum
–
–
–
–
Normally Closed Bellows Seal
Available to Order
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
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Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
–
High Vacuum
–
–
–
–
Normally Closed Bellows Seal
Available to Order
77
48
121
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–
–
–
–
–
–
–
Available to Order
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Available to Order
110
79
185
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–
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–
Available to Order
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–
–
High vacuum angle valve for semiconductor and vacuum applications
Bellows Seal
Normally Closed
–
–
–
Available to Order
–
–
–
–
–
High Vacuum
Bellows Seal
–
–
–
Normally Closed
Available to Order
–
–
–
–
–
High Vacuum
–
–
–
–
Normally Closed Bellows Seal
Available to Order
–
–
–
–
–
High vacuum angle valve for semiconductor and vacuum applications
–
–
–
–
Normally Closed Bellows Seal
Available to Order
–
–
–
–
–
–
–
–
–
–
–
Available to Order