Details
Seal Material
FKM
Actuation
Normally Closed
Application
High vacuum angle valve for semiconductor and vacuum applications
Feature
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
Body Material
Aluminium
Valve Material
Aluminium
Length mm
74
Width mm
121
Brand
SMC
Series
XL2
Manufacturer
SMC
Height mm
48
Seal Type
Bellows Seal
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Length mm
Height mm
Width mm
Feature
Operation
Flange Specification
Angle
Application
Actuation
Actuator Working Temperature
Ambient Temperature
List Price
104
66
171
–
–
–
–
–
–
–
–
Available to Order
–
–
–
Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
Normally Closed
KF NW
Angle valve
High vacuum applications requiring minimal contamination and corrosion resistance
Single acting
–
–
Available to Order
98
66
171
High corrosion resistance to fluorine gas Minimal outgassing Minimal contamination from heavy metals Uniform baking temperature Lightweight Compact
Normally Closed
–
–
–
Single acting
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
Normally Closed
High Vacuum
–
5 to 60°C
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
Normally Closed Bellows Seal
–
–
High Vacuum
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
Normally Closed Bellows Seal
–
–
High Vacuum
–
–
5 to 60°C
Available to Order
77
48
121
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
Available to Order
110
79
185
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
High vacuum angle valve for semiconductor and vacuum applications
Normally Closed
–
–
Available to Order
–
–
–
–
Normally Closed
–
–
High Vacuum
–
–
–
Available to Order
–
–
–
–
Normally Closed Bellows Seal
–
–
High Vacuum
–
–
5 to 60°C
Available to Order
–
–
–
–
Normally Closed Bellows Seal
–
–
High vacuum angle valve for semiconductor and vacuum applications
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
Normally Closed, Single Acting, Bellows Seal
–
–
High vacuum angle valve for semiconductor and vacuum applications
–
5 to 60°C
–
Available to Order


