Details
Seal Material
FKM
Body Material
Aluminium
Operation
Normally Closed
Width mm
171
Feature
High corrosion resistance to fluorine gas Minimal outgassing Minimal contamination from heavy metals Uniform baking temperature Lightweight Compact
Height mm
66
Length mm
98
Actuation
Single acting
Brand
SMC
Series
XL2
Manufacturer
SMC
Seal Type
Bellows Seal
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Length mm
Feature
Flange Specification
Angle
Application
Width mm
Actuation
Valve Material
Height mm
Actuator Working Temperature
Operation
Ambient Temperature
List Price
104
–
–
–
–
171
–
–
66
–
–
–
Available to Order
–
Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
KF NW
Angle valve
High vacuum applications requiring minimal contamination and corrosion resistance
–
Single acting
–
–
–
Normally Closed
–
Available to Order
74
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
–
–
High vacuum angle valve for semiconductor and vacuum applications
121
Normally Closed
Aluminium
48
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
Normally Closed
High Vacuum
–
–
–
–
5 to 60°C
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
–
–
High Vacuum
–
–
–
–
–
Normally Closed Bellows Seal
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
–
–
High Vacuum
–
–
–
–
–
Normally Closed Bellows Seal
5 to 60°C
Available to Order
77
–
–
–
–
121
–
–
48
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
110
–
–
–
–
185
–
–
79
–
–
–
Available to Order
–
–
–
–
High vacuum angle valve for semiconductor and vacuum applications
–
Normally Closed
–
–
–
–
–
Available to Order
–
–
–
–
High Vacuum
–
–
–
–
–
Normally Closed
–
Available to Order
–
–
–
–
High Vacuum
–
–
–
–
–
Normally Closed Bellows Seal
5 to 60°C
Available to Order
–
–
–
–
High vacuum angle valve for semiconductor and vacuum applications
–
–
–
–
–
Normally Closed Bellows Seal
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
High vacuum angle valve for semiconductor and vacuum applications
–
–
–
–
5 to 60°C
Normally Closed, Single Acting, Bellows Seal
–
Available to Order


