SMC High Vacuum Angle Valve
Product Code: XLA-16G-2-XF1A...
Available to Order
tech sheet
Details
Seal Material
FKM
Flange Specification
KF NW
Body Material
Aluminium
Operation
Normally Closed
Application
High vacuum applications requiring minimal contamination and corrosion resistance
Angle
Angle valve
Feature
Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
Actuation
Single acting
Brand
SMC
Series
XL2
Manufacturer
SMC
Seal Type
Bellows Seal
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Length mm
Height mm
Width mm
Feature
Actuation
Application
Valve Material
Actuator Working Temperature
Angle
Operation
Ambient Temperature
List Price
104
66
171
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Available to Order
74
48
121
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
Normally Closed
High vacuum angle valve for semiconductor and vacuum applications
Aluminium
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Available to Order
98
66
171
High corrosion resistance to fluorine gas Minimal outgassing Minimal contamination from heavy metals Uniform baking temperature Lightweight Compact
Single acting
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Normally Closed
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Available to Order
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Available to Order
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Available to Order
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Available to Order
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High Vacuum
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5 to 60°C
Normally Closed
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Available to Order
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Available to Order
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Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
–
High Vacuum
–
–
–
Normally Closed Bellows Seal
–
Available to Order
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Available to Order
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Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
–
High Vacuum
–
–
–
Normally Closed Bellows Seal
5 to 60°C
Available to Order
77
48
121
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Available to Order
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Available to Order
110
79
185
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Available to Order
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Normally Closed
High vacuum angle valve for semiconductor and vacuum applications
–
–
–
–
–
Available to Order
–
–
–
–
–
High Vacuum
–
–
–
Normally Closed
–
Available to Order
–
–
–
–
–
High Vacuum
–
–
–
Normally Closed Bellows Seal
5 to 60°C
Available to Order
–
–
–
–
–
High vacuum angle valve for semiconductor and vacuum applications
–
–
–
Normally Closed Bellows Seal
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
High vacuum angle valve for semiconductor and vacuum applications
–
5 to 60°C
–
Normally Closed, Single Acting, Bellows Seal
–
Available to Order