Details
Brand
SMC
Manufacturer
SMC
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Length mm
Height mm
Seal Material
Width mm
Series
Body Material
Feature
Operation
Flange Specification
Angle
Application
Actuation
Seal Type
Valve Material
Actuator Working Temperature
Ambient Temperature
List Price
104
66
FKM
171
XL2
Aluminium
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
FKM
–
XL2
Aluminium
Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
Normally Closed
KF NW
Angle valve
High vacuum applications requiring minimal contamination and corrosion resistance
Single acting
Bellows Seal
–
–
–
Available to Order
74
48
FKM
121
XL2
Aluminium
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
–
–
–
High vacuum angle valve for semiconductor and vacuum applications
Normally Closed
Bellows Seal
Aluminium
–
–
Available to Order
98
66
FKM
171
XL2
Aluminium
High corrosion resistance to fluorine gas Minimal outgassing Minimal contamination from heavy metals Uniform baking temperature Lightweight Compact
Normally Closed
–
–
–
Single acting
Bellows Seal
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
FKM
–
XL2
Aluminium
–
–
–
Normally Closed
High Vacuum
–
–
–
5 to 60°C
–
Available to Order
–
–
FKM
–
XL2
Aluminium
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
FKM
–
XL2
Aluminium
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
Normally Closed Bellows Seal
–
–
High Vacuum
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
FKM
–
XL2
Aluminium
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
Normally Closed Bellows Seal
–
–
High Vacuum
–
–
–
–
5 to 60°C
Available to Order
77
48
FKM
121
XL2
Aluminium
–
–
–
–
–
–
–
–
–
–
Available to Order
110
79
FKM
185
XL2
Aluminium
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
FKM
–
XL2
Aluminium
–
–
–
–
High vacuum angle valve for semiconductor and vacuum applications
Normally Closed
Bellows Seal
–
–
–
Available to Order
–
–
FKM
–
XL2
Aluminium
–
Normally Closed
–
–
High Vacuum
–
Bellows Seal
–
–
–
Available to Order
–
–
FKM
–
XL2
Aluminium
–
Normally Closed Bellows Seal
–
–
High Vacuum
–
–
–
–
5 to 60°C
Available to Order
–
–
FKM
–
XL2
Aluminium
–
Normally Closed Bellows Seal
–
–
High vacuum angle valve for semiconductor and vacuum applications
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
FKM
–
XL2
Aluminium
–
Normally Closed, Single Acting, Bellows Seal
–
–
High vacuum angle valve for semiconductor and vacuum applications
–
–
–
5 to 60°C
–
Available to Order


